Photo & Etch

SMD is equipped with a full range of photolithography equipment for feature sizes to just below 1 micron. A Class 10,000 clean room houses an OAI 600 series contact printer which can pattern substrates ranging from 1 inch round to 20 inches square, along with resist spinners, cleaning stations and ovens for process bake and annealing. Two plasma ashers and a LAM reactive ion etch machine are housed inside clean tents.

SMD's deposition capabilities include a Veeco thermal evaporation station, an MRC three-target sputtering station and three wet stations for plating. SMD has considerable expertise in carbon arc deposition processes.

Measurement & Inspection

Measurement and inspection are carried out with an assortment of optical microscopes, a Tencor long-scan profilometer and a JEOL JSM-840 scanning electron microscope. SMD also runs custom-made vacuum test stations for devices up to 12 inches in diameter.

For information contact SMD at (512) 997-7781 or eaton@stellar-micro.com.

Back to top